Unpatterned Wafer Inspection

  1. Takano WM-7S Unpatterned Wafer Surface Inspection Tool

    Unpatterned Wafer Inspection

    Takano WM-7S Unpatterned Wafer Surface Inspection Tool

    Takano WM-7S Unpatterned Wafer Surface Inspection Tool

    • 405 nm Laser Source
    • Particle Detection Down to 79 nm 
    • Configured for 200mm Wafers
    • Manufactured in 2023
    • Unused Since Installation/Qualification  
  2. KLA-TENCOR Puma 9130 Darkfield Inspection Tool

    Unpatterned Wafer Inspection

    KLA-TENCOR Puma 9130 Darkfield Inspection Tool

    KLA-TENCOR Puma 9130 Darkfield Inspection Tool

    • Parts Tool
    • Please Inquire for Additional Details
  3. KLA-TENCOR Puma 9120 IS Darkfield Inspection Tool

    Unpatterned Wafer Inspection

    KLA-TENCOR Puma 9120 IS Darkfield Inspection Tool

    KLA-TENCOR Puma 9120 IS Darkfield Inspection Tool

    • For 200mm or 300mm Wafers
    • 2ea Cameras
    • Please Inquire for Additional Details
  4. Tencor Surfscan 5500 Unpatterned Wafer Surface Inspection Tool

    Unpatterned Wafer Inspection

    Tencor Surfscan 5500 Unpatterned Wafer Surface Inspection Tool

    Tencor Surfscan 5500 Unpatterned Wafer Surface Inspection Tool

  5. Tencor Surfscan 4500

    Unpatterned Wafer Inspection

    Tencor Surfscan 4500

    TENCOR Surfscan 4500 Unpatterned Wafer Surface Inspection Tool

    • Cassette to Cassette Handling of 3” – 6” Wafers
    • New HeNe 2mW Laser, 632.8 nm Wavelength
    • New HeNe Laser Power Supply
    • 2 µ Particle Size Sensitivity
    • Automatic Calibration
    • Flatscreen Monitor
    • System Calibrated & Demonstrated
    • Calibration Standard Wafer Included
  6. GCA/TROPEL 9000

    Unpatterned Wafer Inspection

    GCA/TROPEL 9000

    Surface Flatness Analyzer